Test apparatus which tests semiconductor chips

ABSTRACT

A test apparatus includes a motherboard including a first surface. The test apparatus further includes a handler including a second surface facing the first surface of the motherboard. The test apparatus additionally includes an adapter board disposed between the first surface of the motherboard and the second surface of the handler. The test apparatus further includes a first sensor mounted on the adapter board and senses data about temperature of the adapter board. The test apparatus additionally includes a wireless transceiver mounted on the adapter board and transmits, in real time, the sensed data.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit of Korean Patent Application No,102016-0095185 filed on Jul. 27, 2016 in the Korean IntellectualProperty Office, the disclosure of which is incorporated by referenceherein in its entirety.

1. TECHNICAL FIELD

One or more exemplary embodiments of the present inventive conceptrelate to a test apparatus, and more particularly, to a test apparatuswhich tests semiconductor chips.

2. DISCUSSION OF THE RELATED ART

Generally, a manufactured semiconductor chip may go through testingprocess to determine whether the semiconductor chip operates without adefect. A test apparatus for testing the semiconductor chip may includean adapter board on which the semiconductor chip may be mounted. If theadapter board is defective, the productivity of the test apparatus maybe reduced.

SUMMARY

One or more exemplary embodiments of the present inventive conceptprovide a test apparatus which may improve productivity and reliabilityby transmitting data about an adapter hoard in real time.

According to an exemplary embodiment of the present inventive concept, atest apparatus includes a motherboard including a first surface. Thetest apparatus further includes a handler including a second surfacefacing the first surface of the motherboard. The test apparatusadditionally includes an adapter board disposed between the firstsurface of the motherboard and the second surface of the handler. Thetest apparatus further includes a first sensor mounted on the adapterhoard and senses data about temperature of the adapter board. The testapparatus additionally includes a wireless transceiver mounted on theadapter board and transmits, in real time, the sensed data.

According to an exemplary embodiment of the present inventive concept, atest apparatus includes a motherboard including a first surfaceincluding a first region and a second region. The second region isadjacent to the first region. The test apparatus further includes afirst adapter board disposed on the first region of the motherboard. Thetest apparatus additionally includes a second adapter board disposed onthe second region of the motherboard. The test apparatus furtherincludes a first sensor mounted on the first adapter board. The testapparatus additionally includes a first wireless transceiver mounted onthe first adapter board and transmits, in real time, data about thefirst adapter board measured by the first sensor. The test apparatusfurther includes a handler including a tray for receiving a firstsemiconductor chip. The tray is mounted on a second surface of thehandler. The second surface of the handler faces the first surface ofthe motherboard. The data about the first adapter board measured by thefirst sensor is data measured during a test and compared against presetdata to determine operation condition of the first semiconductor chip.

According to an exemplary embodiment of the present inventive concept, atest apparatus includes a motherboard including a first surface. Thetest apparatus further includes a handler including a second surfacefacing the first surface of the motherboard. The test apparatusadditionally includes an adapter board unit disposed on the firstsurface of the motherboard. The adapter board unit includes a firstadapter board, a second adapter board and a third adapter board disposedbetween the first and second adaptor boards. The test apparatus furtherincludes a plurality of first sensors mounted on the first adapter boardand the second adapter board. The first sensor senses an operationcondition.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features of the inventive concept will become moreapparent by describing in detail exemplary embodiments thereof, withreference to the accompanying drawings, in which:

FIG. 1 is a perspective view of a test apparatus according to anexemplary embodiment of the present inventive concept;

FIG. 2 is a plan view of the test apparatus of FIG. 1;

FIGS. 3 and 4 are perspective views of test apparatuses according to anexemplary embodiment of the present inventive concept;

FIG. 5 illustrates an upper surface of a first adapter board of FIG. 1;

FIG. 6 illustrates a lower surface of the first adapter board of FIG. 1;

FIGS. 7, 8 and 9 are side views of first adapter boards according to anexemplary embodiment of the present inventive concept in a state inwhich a handler is mounted on a motherboard; and

FIGS. 10, 11, 12 and 13 are side views of adapter board units accordingto an exemplary embodiment of the present inventive concept in a statein which a handler is mounted on a motherboard.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Exemplary embodiments of the present inventive concept will be describedin more detail below with reference to the accompanying drawings, inwhich exemplary embodiments of the present inventive concept are shown.

It is noted that the use of any and all examples or exemplary termsprovided herein are intended merely to describe the present inventiveconcept and are not to limit the scope of the present inventive concept.

Test apparatuses according to an exemplary embodiment of the presentinventive concept will now be described with reference to FIGS. 1through 4.

FIG. 1 is a perspective view of a test apparatus according to anexemplary embodiment of the present inventive concept. FIG. 2 is a planview of the test apparatus of FIG. 1. FIGS. 3 and 4 are perspectiveviews of test apparatuses according to an exemplary embodiment of thepresent inventive concept.

Referring to FIG. 1, the test apparatus according to an exemplaryembodiment of the present inventive concept may include a motherboard100, an adapter board unit 110, and a handler 120.

The motherboard 100 may include a first surface 101, a second surface100 a, and a third surface 100 b. The second surface 100 a and the thirdsurface 100 b may extend from the first surface 101 in a direction. Thesecond surface 100 a and the third surface 100 b may be separated fromeach other and face each other.

The motherboard 100 may control the process of testing semiconductorchips. In addition, the motherboard 100 may generate electrical signalsfor testing semiconductor chips.

The adapter board unit 110 may be disposed on the first surface 101 ofthe motherboard 100 and may have a quadrangular shape. The adapter boardunit 110 may include a plurality of adapter boards. For example, theadapter board unit 110 may include first through fifth adapter boards111 through 115.

The adapter board unit 110 may include 64 adapter boards. However, thenumber of adapter boards included in the adapter board unit 110 is notlimited to 64. The adapter board unit 110 may include various numbers ofadapter boards. For example, the adapter board unit 110 may include 32adapter boards.

Each adapter board of a plurality of adapter boards included in theadapter board unit 110 may include a connector pair for an electricalconnection with the motherboard 100. For example, the connector pair maybe disposed between each adapter board of the adapter board unit 110 andthe motherboard 100. A description of the connector pair will be givenlater.

A plurality of adapter boards may be disposed adjacent to one anotherwithout a space between them, thereby forming a plate shape. However,the arrangement of the adapter boards is not limited to the illustrationin FIG. 1. For example, the adapter boards may be disposed on themotherboard 100 to be separated from one another with a predeterminedgap between them.

Further, a semiconductor chip that is to be tested by the test apparatusmay be mounted on each adapter board of the plurality of adapter boards.

The handler 120 may include a fourth surface 122. The fourth surface 122of the handler 120 may face the first surface 101 of the motherboard100. In an exemplary embodiment of the present inventive concept, thefourth surface 122 of the handler 120 may include a tray 130 forreceiving semiconductor chips that are to be tested. For example, thetray 130 may be mounted on the fourth surface 122 of the handler 120.For example, the tray 130 may include the semiconductor chips 131.

The handler 120 may include an opening 123, for example, a space inwhich the motherboard 100 may be placed. The opening 123 may include thefourth surface 122 of the handler 120.

The handler 120 may mount semiconductor chips, which are be tested, onthe adapter board unit 110. The handler 120 may bring each semiconductorchip included in the tray 130 into contact with any one of the adapterboards of the adapter board unit 110. The tray 130 may be mounted on thefourth surface 122 of the handler 120. However, the position of the tray130 is not limited to the illustration in FIG. 1. For example, the tray130 might not be mounted.

Referring to FIG. 2, to mount semiconductor chips on the adapter boardunit 110, the fourth surface 122 of the handler 120 may be disposed toface the first surface 101 of the motherboard 100.

The motherboard 100 may be placed in the opening 123 of the handler 120and may occupy a portion of the opening 123. For example, themotherboard 100 may be placed in the opening 123 of the handler 120 butmight not completely occupy the opening 123. For example, a width of theopening 123 may be wider than that of the motherboard 100.

As the motherboard 100 is placed in the opening 123 of the handler 120,the adapter board unit 110 may be positioned between the first surface101 of the motherboard 100 and the fourth surface 122 of the handler120. For example, the adapter board unit 110 may be placed in a closedspace formed by the handler 120 and the motherboard 100 coupled to eachother. For example, the closed space may be formed between the fourthsurface 122 of the handler 120 and the first surface 101 of themotherboard 100. The closed space will be described later.

The various devices 200 including the sensors will be described later.Further, the tray 130 may be disposed between the adapter board unit 110and the fourth surface 122 of the handler 120.

The first adapter board 111 and the second adapter board 112 of theadapter board unit 110 may be disposed in a first region region I and asecond region region II of the motherboard 100, respectively. This willbe described in detail later. Further, the first adapter board 111 maybe a disposed in a corner of the adapter board unit 110, and the secondadapter board 112 may be adjacent to the first adapter board 111. Inaddition, the third adapter 113 may be disposed in another corner, ofthe adapter board unit 110, that is opposite the first adapter board111.

Referring back to FIG. 1, the handler 120 may include the fourth surface122, a fifth surface 120 a, and a sixth surface 120 b. The fifth surface120 a and the sixth surface 120 b may extend from the fourth surface 122in a direction. The fifth surface 120 a and the sixth surface 120 b maybe separated from each other and face each other.

In an exemplary embodiment of the present inventive concept, the opening123 may be defined by the fourth surface 122, the fifth surface 120 aand the sixth surface 120 b of the handler 120. However, exemplaryembodiments of the present inventive concept are not limited thereto.

For example, referring to FIG. 3, the handler 120 may include the fourthsurface 122 and the fifth surface 120 a only, in this case, the opening123 of the handler 120 may be defined by the fourth surface 122 and thefifth surface 120 a. For example, the handler 120 may have a shapesimilar to an “L”. In the test apparatus of FIG. 3, the motherboard 100may be placed in the opening 123 but might not completely fill theopening 123. Further, in FIG. 3, as in FIG. 1, when the motherboard 100is placed in the opening 123, the first surface 101 of the motherboard100 and the fourth surface 122 of the handler 120 may face each other.In other words, in FIG. 3, as in FIG. 1, the adapter board unit 110 maybe disposed between the first surface 101 of the motherboard 100 and thefourth surface 122 of the handler 120.

In addition, for example, referring to FIG. 4, the handler 120 may havea shape similar to a ‘⊂’ shape. For example, the handler 120 may have asquare-like “C” shape. The opening 123 may be defined by the fourthsurface 122, the fifth surface 120 a, and the sixth surface 120 b. Inthe test apparatus of FIG. 4, the motherboard 100 may also be placed inthe opening 123 but might not completely fill the opening 123. Further,in FIG. 4, as in FIG. 1, when the motherboard 100 is placed in theopening 123, the first surface 101 of the motherboard 100 and the fourthsurface 122 of the handler 120 may face each other. In other words, inFIG. 4, as in FIG. 1, the adapter board unit 110 may be disposed betweenthe first surface 101 of the motherboard 100 and the fourth surface 122of the handler 120. However, the adapter board unit 110 may be placedvertically in FIG. 4.

A test apparatus according to exemplary embodiments of the presentinventive concept will now be described with reference to FIGS. 1 and 5through 7. For clarity, a redundant description of elements and featuresthat may be assumed to be substantially similar to elements and featuresdescribed above will be omitted.

FIG. 5 illustrates an upper surface 111U of the first adapter board 111of FIG. 1. FIG. 6 illustrates a lower surface 111L of the first adapterboard 111 of FIG. 1. FIG. 7 is a side view of a first adapter board 111according to an exemplary embodiment of the present inventive concept ina state in which a handler 120 is mounted on a motherboard 100. For easeof description, a tray 130 and a connector pair 301 and 302 are notillustrated in the drawings.

Referring to FIGS. 1, 5 and 6, a sensor may be mounted on the firstadapter board 111 of a test apparatus according to an exemplaryembodiment of the present inventive concept. In addition, variousdevices such as a wireless transceiver 212 may be mounted on the firstadapter board 111.

In an exemplary embodiment of the present inventive concept, a pluralityof sensors may be mounted on the upper surface 111U and the lowersurface 111L of the first adapter board 111. In addition, in anexemplary embodiment of the present inventive concept, one sensor may bemounted on either the upper surface 111U or the lower surface 111L ofthe first adapter board 111.

Further, various devices 200 including sensors may be mounted on eitherthe upper surface 111U or the lower surface 111L of the first adapterboard 111. However, the position of the various devices 200 includingthe sensors is not limited to the illustration in the drawings. Forexample, the various devices 200 including the sensors may be mounted ona side surface of the first adapter board 111 (e.g., a surface thatextends from the upper surface 111U of the first adapter board 111).

The upper surface 111U of the first adapter board 111 may face thefourth surface 122 of the handler 120. The lower surface 111L of thefirst adapter board 111 may face a first surface 101 of the motherboard100. The side surface of the first adapter board 111 may connect theupper surface 111U and the lower surface 111L of the first adapter board111.

The various devices 200, including the sensors, may include, forexample, a temperature sensor 201 which senses data about a temperatureof the first adapter board 111. In FIG. 5, three temperature sensors 201may be mounted on the upper surface 111U of the first adapter board 111.However, the number of the temperature sensors 201 mounted on the firstadapter board 111 is not limited to three. For example, a plurality oftemperature sensors 201 or one temperature sensor 201 may be mounted onthe first adapter board 111. The temperature sensor 201 may be disposedon, for example, the upper surface 111U of the first adapter board 111.However, the position of the temperature sensor 201 is not limited tothe upper surface 111U of the first adapter board 111. The temperaturesensor 201 may be disposed on the, for example, lower surface 111L ofthe first adapter board 111 or on both the upper surface 111U and thelower surface 111L of the first adapter board 111.

The temperature sensor 201 may be used to measure whether a settemperature matches a current temperature of the first adapter board 111in addition, the temperature sensor 201 may be used to sense thetemperature of an area of the first adapter board 111 on which asemiconductor chip to be tested is to be mounted.

The various devices 200 including the sensors may include, for example,a tilt sensor 202 which senses data about a tilt of the first adapterboard 111. Here, the tilt of the first adapter board 111 may be a slopeof the first adapter board 111 with respect to the first surface 101 ofthe motherboard 100. In FIG. 5, one tilt sensor 202 may be mounted onthe upper surface 111U of the first adapter board 111. However, thenumber of the tilt sensors 202 mounted on the first adapter board 111 isnot limited to one. For example, a plurality of tilt sensors 202 may bemounted on the first adapter board 111. For example, the tilt sensor 202may be disposed on, for example, the upper surface 111U of the firstadapter board 111. However, the position of the tilt sensor 202 is notlimited to the upper surface 111U of the first adapter board 111. Thetilt sensor 202 may be disposed on the lower surface 111L of the firstadapter board 111 or on both the upper surface 111U and the lowersurface 111L of the first adapter board 111.

The tilt sensor 202 may be used for various points of contact between,for example, the first adapter board 111 and the first surface 101 ofthe motherboard 100 to be accurately made during the process of testinga semiconductor chip.

The various devices 200 including the sensors may include a vibrationsensor 203 which senses data about whether the first adapter board 111vibrates. In FIG. 5, one vibration sensor 203 may be mounted on theupper surface 111U of the first adapter board 111. However, the numberof the vibration sensors 203 mounted on the first adapter board 111 isnot limited to one. For example, a plurality of vibration sensors 203may be mounted on the first adapter board 111. The vibration sensor 203may be disposed on, for example, the upper surface 111U of the firstadapter board 111. However, the position of the vibration sensor 203 isnot limited to the upper surface 111U of the first adapter board 111.For example, the vibration sensor 203 may be disposed on the lowersurface 111L of the first adapter board 111 or on both the upper surface111U and the lower surface 111L of the first adapter board 111.

The vibration sensor 203 may be used to ensure the reliability andaccuracy of the test apparatus by sensing whether the first adapterboard 111 vibrates.

The various devices 200 including the sensors ma include, for example, apressure sensor 204 which senses data about a pressure applied to thefirst adapter board 111. In FIG. 5, four pressure sensors 204 may bemounted on the upper surface 111U of the first adapter board 111.However, the number of the pressure sensors 204 mounted on the firstadapter board 111 is not limited to four. For example, a plurality ofpressure sensors 204 or one pressure sensor 204 may be mounted on thefirst adapter board 111. The pressure sensor 204 may be disposed on, forexample, the upper surface 111U of the first adapter board 111. However,the position of the pressure sensor 204 is not limited to the uppersurface 111U of the first adapter board 111. For example, the pressuresensor 204 may be disposed on the lower surface 111L of the firstadapter board 111 or on both the upper surface 111U and the lowersurface 111L of the first adapter board 111. Further, the arrangement ofthe pressure sensors 204 on the upper surface 111U of the first adapterboard 111 is not limited to the arrangement illustrated in FIG. 5.

The pressure sensor 204 may be used ensure the reliability and accuracyof the test apparatus by sensing the pressure applied to the firstadapter board 111.

The various devices 200 including the sensors may include, for example,a bending sensor 205 which senses data about whether the first adapterboard 111 is bent or deformed. In FIG. 5, one bending sensor 205 ismounted on the upper surface 111U of the first adapter board 111.However, the number of the bending sensors 205 mounted on the firstadapter board 111 is not limited to one. For example, a plurality ofbending sensors 205 or one bending sensor 205 may be mounted on thefirst adapter board 111. The bending sensor 205 may be disposed on, forexample, the upper surface 111U of the first adapter board 111. However,the position of the bending sensor 205 is not limited to the uppersurface 111U of the first adapter board 111. For example, the bendingsensor 205 may be disposed on the lower surface 111L of the firstadapter board 111 or on both the upper surface 111U and the lowersurface 111L of the first adapter board 111.

The bending sensor 205 may be used to identify whether the first adapterboard 111 is mounted on the motherboard 100 by sensing whether the firstadapter board 111 is bent or deformed.

The various devices 200 including the sensors may include, for example,a humidity sensor 206 which senses data about humidity of the firstadapter board 111. In FIG. 6, one humidity sensor 206 may be mounted onthe lower surface 111L of the first adapter board 111. However, thenumber of the humidity sensors 206 mounted on the first adapter board111 is not limited to one. For example, a plurality of humidity sensors206 may be mounted on the first adapter board 111. The humidity sensor206 may be disposed on, for example, the lower surface 111L of the firstadapter board 111. However, the position of the humidity sensor 206 isnot limited to the lower surface 111L of the first adapter board 111.For example, the humidity sensor 206 may be disposed on the uppersurface 111U of the first adapter hoard 111 or on both the upper surface111U and the lower surface 111L of the first adapter board 111.

The humidity sensor 206 may be used to increase the reliability andproductivity of the test apparatus and the test process by preventingvarious short circuits caused by humidity during a testing of asemiconductor chip.

The various devices 200 including the sensors may include, for example,an air flow sensor 207 which senses data about the air flow around thefirst adapter board 111. In FIG. 6, one air flow sensor 207 may bemounted on the lower surface 111L of the first adapter board 111.However, the number of the air flow sensors 207 mounted on the firstadapter board 111 is not limited to one. For example, a plurality of airflow sensors 207 may be mounted on the first adapter board 111. The airflow sensor 207 may be disposed on, for example, the lower surface 111Lof the first adapter board 111. However, the position of the air flowsensor 207 is not limited to the lower surface 111L of the first adapterboard 111. For example, the air flow sensor 207 may be disposed on theupper surface 111U of the first adapter board 111 or on both the uppersurface 111U and the lower surface 111L of the first adapter board 111.

The air flow sensor 207 may be used to prevent various short circuitsduring a test of a semiconductor chip and to increase the reliabilityand productivity of the test apparatus and the test process.

The various devices 200 including the sensors may include, for example,a battery 208 which supplies power for operating the various devices 200including the sensors. In FIG. 6, one battery 208 may be mounted on thelower surface 111U of the first adapter board 111. However, the numberof the batteries 208 mounted on the first adapter board 111 is notlimited to one. For example, a plurality of batteries 208 may be mountedon the first adapter board 111. The battery 208 may be disposed on, forexample, the lower surface 111U of the first adapter board 111. However,the position of the battery 208 is not limited to the lower surface 111Lof the first adapter board 111. For example, the battery 208 may bedisposed on the upper surface 111U of the first adapter board 111 or onboth the upper surface 111U and the lower surface 111U of the firstadapter board 111.

The various devices 200 including the sensors may include, for example,a microcontroller 211 which controls the sensors to perform a datameasurement operation (e.g., sensing data about the temperature of thefirst adapter board 111). The microcontroller 211 may be disposed on,for example, the lower surface 111U of the first adapter board 111.However, the position of the microcontroller 211 is not limited to thelower surface 111L of the first adapter board 111. For example,microcontroller 211 may be disposed on the upper surface 111U of thefirst adapter board 111 or on both the upper surface 111U and the lowersurface 111L of the first adapter board 111.

The various devices 200 including the sensors may include, for example,a wireless transceiver 212 which transmits, in real time, data that issensed by the sensors. For example, the data may be transmitted uponreceipt of newly sensed data from the sensors, for example, everysecond, millisecond, or nanosecond; however exemplary embodiments of thepresent inventive concept are not limited thereto. The wirelesstransceiver 212 may be disposed on, for example, the lower surface 111Lof the first adapter board 111. However, the position of the wirelesstransceiver 212 is not limited to the lower surface 111L of the firstadapter board 111. For example, the wireless transceiver 212 may bedisposed on the upper surface 111U of the first adapter board 111 or onboth the upper surface 111U and the lower surface 111L of the firstadapter board 111.

When a semiconductor chip is tested, the handler 120 and the motherboard100 may form a closed space which will be described later. Since thefirst adapter board 111 is disposed in the closed space, it may bedifficult to access the first adapter board 111 during a test of thesemiconductor chip. In the test apparatus according to an exemplaryembodiment of the present inventive concept, the wireless transceiver212 mounted on the first adapter board 111 transmits data measured byvarious sensors to an external destination (e.g., a device or server) inreal time. Therefore, defects of the first adapter board 111 or anenvironmental condition of the closed space can be measured. Thus, theproductivity and reliability of the test apparatus may be improved.

Data transmitted in real time by the wireless transceiver 212 may bedata sensed by the above-described sensors 201 through 207.

The various devices 200 including the sensors may include, for example,a nonvolatile memory 213 which stores data sensed by the sensors 201through 207. The nonvolatile memory 213 may be disposed on, for example,the lower surface 111L of the first adapter board 111. However, theposition of the nonvolatile memory 213 is not limited to the lowersurface 111L of the first adapter board 111. For example, thenonvolatile memory 213 may be disposed on the upper surface 111U of thefirst adapter board 111 or on both the upper surface 111U and the lowersurface 111L of the first adapter board 111.

The various devices 200 including the sensors 201 through 207 mayinclude, for example, an antenna pattern 214 which can receive powerwirelessly. The antenna pattern 214 may be provided on, for example, thelower surface 111L of the first adapter board 111. However, the positionof the antenna pattern 214 is not limited to the lower surface 111L ofthe first adapter board 111. For example, the antenna pattern 214 may beprovided on the upper surface 111U of the first adapter board 111 or onboth the upper surface 111U and the lower surface 111L of the firstadapter board 111.

Seven sensors 201 through 207 may be mounted on the first adapter board111. However, exemplary embodiments of the present inventive concept arenot limited to the above sensors 201 through 207. For example, the firstadapter board 111 may include a sensor which can sense various data. Inaddition, the number of sensors mounted on the first adapter board 111is not limited to seven. For example, the first adapter board 111 mayinclude various numbers of sensors. Further, the various devices 200including the sensors 201 through 207 might not be mounted at thepositions illustrated in the FIGS. 5 and 6, and the various devices 200including the sensors 201 through 207 may be mounted at variouspositions.

Referring to FIGS. 1 and 7, the first adapter board 111 may be disposedin the first region I of the motherboard 100.

The first surface 101 of the motherboard 100 may be included in thefirst region I. The first adapter board 111, according to an exemplaryembodiment of the present inventive concept, may be disposed on thefirst region I of the motherboard 100.

The various devices 200 including the sensors (e.g., 201, 203, and 206through 208) may be mounted on both the upper surface 111U and the lowersurface 111L of the first adapter board 111. However, the position ofthe various devices 200 including the sensors 201, 203, and 206 through208 is not limited to the upper surface 111U and the lower surface 111Lof the first adapter board 111. For example, the various devices 200including the sensors 201, 203, and 206 through 208 may be mounted oneither the upper surface 111U or the lower surface 111L of the firstadapter board 111.

For example, the temperature sensor 201 may be mounted on at least oneof the upper surface 111U and the lower surface 111L of the firstadapter board 111. In an exemplary embodiment of the present inventiveconcept, a semiconductor chip might not be mounted on the upper surface111U of the first adapter board 111. For example, only the variousdevices 200 including the sensors 201, 203, and 206 through 208 may bemounted on the upper surface 111U of the first adapter board 111.

The first adapter board 111 and the motherboard 100 may be electricallyconnected to each other by the connector pair 301 and 302. The connectorpair 301 and 302 may be disposed at both ends of the first adapter board111. However, the position of the connector pair 301 and 302 is notlimited to both ends of the first adapter board 111. For example, theconnector pair 301 and 302 may be disposed at various positions toelectrically connect the motherboard 100 and the first adapter board 111to each other. Further, there may be a plurality of connector pairs 301and 302.

The handler 120 may be placed on the motherboard 100. The placement ofthe handler 120 on the motherboard 100 may make the first surface 101 ofthe motherboard. 100 and the fourth surface 122 of the handler 120 faceeach other. For example, referring also to FIG. 1, the motherboard 100may be disposed in the opening 123 of the handler 120.

The motherboard 100 may be placed in part of the opening 123 of thehandler 120. However, the motherboard 100 might not completely fill theopening 123. For example, the sensors 201 through 204 disposed on theupper surface 111U of the first adapter board 111 might not contact thefourth surface 122 of the handler 120.

The placement of the motherboard 100 in the opening 123 may form aclosed space 300. The closed space 300 may be defined by the firstsurface 101 of the motherboard 101, the fourth surface 122, fifthsurface 120 a and sixth surface 120 b of the handler 120. Further, themotherboard 100 may be placed in at least a part of the opening 123 ofthe handler 120, thereby forming a remaining part of the opening 123(e.g., a remaining space) as the closed space 300. Accordingly, thefirst adapter board 111 (i.e., the adapter board unit 110) may be placedin the closed space 300.

In an exemplary embodiment of the present inventive concept, the closedspace 300 may be further defined by the second surface 100 a of themotherboard 100 and the fifth surface 120 a of the handler 120contacting each other and by the third surface 100 b of the motherboard100 and the sixth surface 120 b of the handler 120 contacting eachother.

In the test apparatus according to an exemplary embodiment of thepresent inventive concept, even if the adapter board unit 110 is placedin the closed space 300 due to the contact between the handler 120 andthe motherboard 100, data measured by the various devices 200 includingthe sensors 201 through 207 mounted on the adapter board unit 110 may bereceived in real time. Therefore, the reliability of the test apparatusmay be improved.

A test apparatus according to exemplary embodiment of the presentinventive concept will now be described with reference to FIGS. 1 and 8.For clarity, a redundant description of elements and features that maybe assumed to be substantially similar to elements and featuresdescribed above will be omitted.

FIG. 8 is a side view of a first adapter board 111 according to anexemplary embodiment of the present inventive in a state in which ahandler 120 may be mounted on a motherboard 100.

Referring to FIGS. 1 and 8, a semiconductor chip 131 may be mounted onan upper surface 111U of the first adapter board 111 according to anexemplary embodiment of the present inventive concept. The semiconductorchip 131 may be mounted on upper surface 111U of the first adapter board111 by the handler 120.

Various devices 200 including sensors (e.g., 201 through 207) may bemounted on at least one of the upper surface 111U and a lower surface111L of the first adapter board 111. For example, the various devices200 including the sensors (e.g., 201 through 207) may be mounted only onthe upper surface 111U of the first adapter board 111 or only on thelower surface 111L of the first adapter board 111. Further, the variousdevices 200 including the sensors (e.g., 201 through 207) may mounted onboth the upper surface 111U of the first adapter board 111 and the lowersurface 111L of the first adapter board 111.

In an exemplary embodiment of the present inventive concept, the variousdevices 200 including the sensors (e.g., 201 through 207) may be mountedon the lower surface 111L of the first adapter board 111.

Here, the various devices 200 including the sensors may include thetemperature sensor 201, the humidity sensor 206, the wirelesstransceiver 212, etc. of FIGS. 5 and 6. Alternatively, the variousdevices 200 including the sensors may include at least one of thetemperature sensor 201, the humidity sensor 206 and the wirelesstransceiver 212 of FIGS. 5 and 6.

In FIG. 8, the tray 130 is not illustrated. However, this is merely anexample, and exemplary embodiments of the present inventive concept arenot limited to this example. For example, the test apparatus accordingto exemplary embodiments of the present inventive concept may furtherinclude the tray 130 between the semiconductor chip 131 and a fourthsurface 122 of the handler 120. Further, the tray 130 may be mounted onthe fourth surface 122 of the handler 120. The semiconductor chip 131may be included in the tray 130 and may contact the upper surface 111Uof the first adapter board 111, which is performed by the handler 120.For example, the semiconductor chip 131 may be mounted on upper surface111U of the first adapter board 111. The semiconductor chip 131 may beelectrically connected to the first adapter board 111 by semiconductorchip connectors 131 c. However, exemplary embodiments of the presentinventive concept are not limited thereto. For example, thesemiconductor chip 131 may be electrically connected the second adapterboard 112.

Semiconductor chip connectors 131 c may have a quadrangular shape.However, a shape of the semiconductor chip connectors 131 c is notlimited to the quadrangular shape, and various shapes and types ofsemiconductor chip connectors 131 c may be employed.

The first adapter board 111, on which the semiconductor chip 131 and thevarious devices 200 including the sensors (e.g., 201 through 207) may bemounted, may be placed in a closed space 300.

As described above, the sensors (e.g., 201 through 207) mounted on thefirst adapter board 111 may sense various data. The sensed data may bedata measured during a test and compared against preset data todetermine an operation condition of the semiconductor chip 131 mountedon the first adapter board 111 For example, the operation condition ofthe semiconductor chip 113 may include temperature of an adapter board(e.g., 111), humidity of the adapter board, pressure applied to theadapter board, tilt of the adapter board with respect to the motherboard100, vibration, and a degree of bending of the adapter board. The senseddata may be transmitted in real time through the wireless transceivermounted on the first adapter board 111 to, for example, an externalserver or device.

In the test apparatus according to an exemplary embodiment of thepresent inventive concept, a semiconductor chip 131 may be mounted on anupper surface of an adapter board, and various devices 200, such as awireless transceiver 212, etc., may be mounted on a lower surface of theadapter hoard. However, exemplary embodiments of the present inventiveconcept are not limited thereto. Therefore, data about the adapter boardmay be sensed while the semiconductor chip 131 is being tested. Inaddition, data about the adapter board placed in the closed space 300 bythe handler 120 may be sensed while the semiconductor chip 131 is beingtested. The sensed data may be transmitted in real time during thetesting of the semiconductor chip. The test apparatus according to anexemplary embodiment of the present inventive concept may determinewhether an adapter board unit 110 is defective and the state (e.g., anyabnormality in temperature or humidity) of the surrounding environmentof the adapter board unit 110 based on the sensed data received in realtime while the semiconductor chip 131 is being tested. Therefore, theproductivity and reliability of the test apparatus may be improved.

A test apparatus according to an exemplary embodiment of the presentinventive concept will now be described with reference to FIGS. 1 and 9.For clarity, a redundant description of elements and features that maybe assumed to be substantially similar to elements and featuresdescribed above will be omitted.

FIG. 9 is a side view of a first adapter board 111 according to anexemplary embodiment of the present inventive concept in a state inwhich a handler 120 may be mounted on a motherboard 100.

Referring to FIGS. 1 and 9, a semiconductor chip 131 and various devices200 including sensors (e.g., 201 through 207) may be mounted on thefirst adapter board 111 according to exemplary embodiments of thepresent inventive concept. The semiconductor chip 131 may be mounted onthe first adapter board 111 by the handler 120.

The various devices 200 including the sensors (e.g., 201 through 207)may be mounted on at least one of an upper surface 111U and a lowersurface 111L of the first adapter board 111. In an exemplary embodimentof the present inventive concept, the various devices 200 including thesensors (e.g., 201 through 207) may be mounted on the upper surface 111Uand the lower surface 111L of the first adapter board 111.

Sensors (e.g., 201 through 207) mounted on the upper surface 111U of thefirst adapter board 111 may not overlap the semiconductor chip 131. Forexample, sensors (e.g., 201 through 207) mounted on the upper surface111U of the first adapter board 111 may be adjacent to and separatedfrom the semiconductor chip 131. The sensors mounted on the uppersurface 111U of the first adapter board 111 may be, e.g., a minimumnumber of sensors to measure the state of the first adapter board 111.

A test apparatus according to an exemplary embodiment of the presentinventive concept will now be described with reference to FIGS. 1, 2, 7and 10. For clarity, a redundant description of elements and featuresthat may be assumed to be substantially similar to elements and featuresdescribed above will be omitted.

FIG. 10 is a side view of an adapter board unit 110 according toexemplary embodiments of the present inventive concept in a state inwhich a handler 120 may be mounted on a motherboard 100.

Referring to FIGS. 1, 2, 7 and 10, various devices 200 including sensors(e.g., 201 through 207) may be mounted on each adapter board of aplurality of adapter boards included in the adapter board unit 110according to an exemplary embodiment of the present inventive concept.

The adapter board unit 110 may include first through fifth adapterboards 111 through 115. A first surface 101 of the motherboard 100 mayinclude a first region region I and a second region region II. The firstregion region I and the second region region II may be adjacent to eachother and separated from each other. The first through fifth adapterboards 111 through 115 may horizontally arranged on the first surface101 of the motherboard 100. Further, the first through fifth adapterboards 111 through 115 might not be vertically stacked on the firstsurface 101 of the motherboard 100.

The first adapter board 111 may be disposed in the first region region Iof the motherboard 100. The second adapter board 112 may be disposed inthe second region region II of the motherboard 100.

The adapter board unit 110 may be disposed in a closed space 300 formedbetween the handler 120 and the motherboard 100.

The various devices 200 including the sensors (e.g., 201 through 207)may be mounted on each of the first through fifth adapter boards 111through 115. For example, a temperature sensor 201 may be mounted on atleast one of an upper surface and a lower surface of each of the firstthrough fifth adapter hoards 111 through 115. Further, the temperaturesensor 201 may be mounted on at least one of the first through fifthadapter boards 111 through 115, or the temperature sensor 201 might notbe mounted on any of the first through fifth adapter boards 111 through115. For example, a wireless transceiver 212 may be mounted on one ofthe upper surface and the lower surface of each of the first throughfifth adapter boards 111 through 115. Further, the wireless transceiver212 may be mounted on at least one of the first through fifth adapterboards 111 through 115, or the wireless transceiver 212 might not bemounted on any of the first through fifth adapter boards 111 through115.

Sensors (e.g., 201 through 207) mounted on the first through fifthadapter boards 111 through 115 may sense various data about the adapterboard unit 110. The various data may include data about the temperature,humidity, bending, vibration, etc. of the first through fifth adapterboards 111 through 115. The sensed data may be transmitted in real timeby the wireless transceiver 212 mounted on each of the first throughfifth adapter boards 111 through 115.

While a tray 130 is not illustrated in FIG. 10, FIG. 10 is merely anexample, and exemplary embodiments of the present inventive concept arenot limited to this example. For example, the tray 130 may be mounted ona fourth surface 122 of the handler 120. The tray 130 might not contactthe various devices 200 including the sensors (e.g., 201 through 207)mounted on the adapter board unit 110.

In an exemplary embodiment of the present inventive concept, the tray130 might not include semiconductor chips 131. For example,semiconductor chips 131 might not be mounted on the adapter boards ofthe adapter board unit 110 by the handler 120.

Further, the test apparatus according to an exemplary embodiment of thepresent inventive concept may be used to diagnose the state of theadapter board unit 110, disposed in the closed space 300, by receivingvarious data about the adapter board unit 110 in real time.

A test apparatus according to an exemplary embodiment of the presentinventive concept will now be described with reference to FIGS. 1, 2, 7and 11. For clarity, a redundant description of elements and featuresthat may be assumed to be substantially similar to elements and featuresdescribed above will be omitted.

FIG. 11 is a side view of an adapter board unit 110 according toexemplary embodiments of the present inventive concept in a state inwhich a handler 120 may be mounted on a motherboard 100.

Referring to FIGS. 1, 2, 7 and 11, various devices 200 including sensors(e.g., 201 through 207) may be mounted on at least one of the first andthird adapter boards 111 and 113, and a semiconductor chip 131 may bemounted on a second adapter board 112. However, in exemplary embodimentsof the present inventive concept, the semiconductor chip 131 may bemounted on a plurality of adapter boards of the adapter board unit 110.

In an exemplary embodiment of the present inventive concept, the variousdevices 200 including the sensors (e.g., 201 through 207) may be mountedon the first adapter board 111, the third adapter board 113, a fourthadapter board 114 and a fifth adapter board 115. For example,semiconductor chips 131 might not be mounted on the first adapter board111, the third adapter board 113, the fourth adapter board 114 and thefifth adapter board 115. However, exemplary embodiments of the presentinventive concept are not limited thereto. The various devices 200including the sensors (e.g., 201 through 207) may be mounted on at leastone adapter board of a plurality of adapter boards of the adapter boardunit 110.

In an exemplary embodiment of the present inventive concept, the firstadapter board 111, the third adapter board 113, the fourth adapter board114 and the fifth adapter board 115 may all have substantially the sameconfiguration of various devices 200. For example, the third adapterboard 113, the fourth adapter board 114 and the fifth adapter board 115may have a configuration substantially the same as that of the firstadapter board 111. However, the present inventive concept is not limitedthereto. For example, various types and numbers of sensors (e.g., 201through 207) and various devices 200 may be mounted on the first adapterboard 111, the third adapter board 113, the fourth adapter board 114 andthe fifth adapter board 115.

Semiconductor chips 131 may be mounted on adapter boards of the adapterboard unit 110, excluding the adapter boards 111, 113, 114 and 115 onwhich the various devices 200 including the sensors (e.g., 201 through207) may be mounted. The various devices 200 including the sensors mightnot be mounted on the adapter boards on which the semiconductor chips131 are mounted.

While a tray 130 is not illustrated in FIG. 11, FIG. 11 is merely anexample, and exemplary embodiments of the present inventive concept isnot limited to this example. For example, the tray 130 may be placedbetween the adapter board unit 110 and a fourth surface 122 of thehandler 120. For example, the tray 130 may be mounted on the fourthsurface 122 of the handier 120. For example, the tray 130 may includethe semiconductor chips 131. The semiconductor chips 131 may be mountedon the adapter boards of the adapter board unit 110 by the handler 120,excluding the adapter boards 111, 113, 114 and 115 on which the variousdevices 200 including the sensors (e.g., 201 through 207) may bemounted.

In the test apparatus according to an exemplary embodiment of thepresent inventive concept, the various devices 200 including the sensors(e.g., 201 through 207) can sense data about the adapter board unit 110and a closed space 300 during a test of whether the semiconductor chips131 operate without a defect. The sensed data can be transmitted in realtime by a wireless transceiver 212 mounted on each of the first adapterboard 111, the third adapter board 113, the fourth adapter board 114 andthe fifth adapter board 115.

Therefore, the test apparatus according to an exemplary embodiment ofthe present inventive concept may obtain various data about the adapterboard unit 110 in real time even while testing whether the semiconductorchips 131 operate normally. Since the test apparatus may determinewhether the adapter board unit 110 is defective and the state (e.g., anyabnormality in temperature or humidity) of the surrounding environmentof the adapter board unit 110 based on the sensed data, the productivityand reliability of the test apparatus may be improved.

A test apparatus according to exemplary embodiments of the presentinventive concept will now be described with reference to FIGS. 1, 2, 8and 12. For clarity, a redundant description of elements and featuresthat may be assumed to be substantially similar to elements and featuresdescribed above will be omitted.

FIG. 12 is a side view of an adapter board unit 110 according toexemplary embodiments of the present inventive concept in a state inwhich a handler 120 may be mounted on a motherboard 100.

Referring to FIGS. 1, 2, 8 and 12, a semiconductor chip 131 and variousdevices 200 including sensors (e.g., 201 through 207) may be mounted ona plurality of adapter boards according to exemplary embodiments of thepresent inventive concept.

In an exemplary embodiment of the present inventive concept, thesemiconductor chip 131 and the various devices 200 including the sensors(e.g., 201 through 207) may be mounted on each adapter board of theplurality of adapter boards included in the adapter board unit 110. Forexample, the semiconductor chip 131 may be mounted on an upper surfaceof each of the adapter boards, and the various devices 200 including thesensors (e.g., 201 through 207) may be mounted on a lower surface ofeach of the adapter boards.

While a predetermined number of sensors may be mounted on the lowersurface of each adapter board of the adapter boards in FIG. 12, this ismerely an example used for ease of description, and exemplaryembodiments of the present inventive concept are not limited to thisexample. For example, the various devices 200 including various numbersand types of sensors (e.g., 201 through 207) may be mounted on each ofthe adapter boards of the adapter board unit 110.

In an exemplary embodiment of the present inventive concept, each of theadapter boards of the adapter board unit 110 may have substantially thesame configuration of various devices 200 as that of the first adapterboard 111 of FIG. 8.

In the adapter board unit 110 of the test apparatus according to anexemplary embodiment of the present inventive concept, the variousdevices 200 including the sensors (e.g., 201 through 207) may be mountedon the lower surface of each of the adapter boards to collect variousdata about the adapter board unit 110 during a test of whether thesemiconductor chip 131 operates normally. Here, a minimum number ofsensors to obtain data about, e.g., the surrounding environment of theadapter board unit 110. Further, the sensors (e.g., 201 through 207) maybe mounted on the lower surface of each of the adapter boards.

Therefore, even if the adapter board unit 110 is disposed in a closedspace 300, data about the adapter board unit 110 may be obtained. Inaddition, sensed data may be transmitted in real time during a test ofthe semiconductor chip 131. Since the test apparatus may determinewhether the adapter board unit 110 is defective and the state (e.g., anyabnormality in temperature or humidity) of the surrounding environmentbased on the sensed data, the productivity and reliability of the testapparatus may be improved.

A test apparatus according to exemplary embodiments of the presentinventive will now be described with reference to FIGS. 1, 2, 9 and 13.For clarity, a redundant description of elements and features that maybe assumed to be substantially similar to elements and featuresdescribed above will be omitted.

FIG. 13 is a side view of an adapter board unit 110 according toexemplary embodiments of the present inventive concept in a state inwhich a handler 120 may be mounted on a motherboard 100.

Referring to FIGS. 1, 2, 9 and 13, a semiconductor chip 131 and variousdevices 200 including sensors (e.g., 201 through 207) may be mounted ona first adapter board 111 according to exemplary embodiments of thepresent inventive concept.

In an exemplary embodiment of the present inventive concept, thesemiconductor chip 131 and the various devices 200 including the sensors(e.g., 201 through 207) may be mounted on each adapter board of aplurality of adapter boards included in the adapter board unit 110. Forexample, the semiconductor chip 131 and the various devices 200including the sensors (e.g., 201 through 207) may be mounted on an uppersurface of each of the adapter boards, and the various devices 200including the sensors (e.g., 201 through 207) may be mounted on a lowersurface of each of the adapter boards.

While a predetermined number of sensors (e.g., 201 through 207) may bemounted on the upper surface and the lower surface of each of theadapter boards in FIG. 13, this is merely an example, and exemplaryembodiments of the present inventive concept are not limited to thisexample. For example, the various devices 200 including various numbersand types of sensors may be mounted on each of the adapter boards of theadapter board unit 110.

In an exemplary embodiment of the present inventive concept, each of theadapter boards of the adapter board unit 110 may have substantially thesame configuration as the first adapter board 111 of FIG. 9.

A minimum number of sensors (e.g., 201 through 207) needed to obtaindata about, e.g., the surrounding environment of the adapter hoard unit110 and the adapter board unit 110 itself, may be mounted on the uppersurface and the lower surface of each of the adapter boards. The variousdevices 200 including the sensors (e.g., 201 through 207) mounted on theupper surface of each of the adapter boards may be positioned adjacentto and separated from the semiconductor chip 131.

While the present inventive concept has been shown and described withreference to the exemplary embodiments thereof, it will be apparent tothose of ordinary skill in the art that various changes in form anddetail may be made thereto without departing from the spirit and scopeof the present inventive concept.

What is claimed is:
 1. A test apparatus comprising: a motherboardincluding a first surface; a handler including a second surface facingthe first surface of the motherboard; an adapter board disposed betweenthe first surface of the motherboard and the second surface of thehandler; a first sensor mounted on the adapter board and senses dataabout temperature of the adapter board; a wireless transceiver mountedon the adapter board and transmits, in real time, the sensed data; asecond sensor mounted on the adapter board, wherein the second sensor isdifferent from the first sensor; a microcontroller mounted on at leastone of an upper surface or a lower surface of the adapter board, andcontrols the first sensor; a nonvolatile memory mounted on at least oneof the upper surface or the lower surface of the adapter board, andstores the data; a battery mounted on at least one of the upper surfaceor the lower surface of the adapter board, and supplies power; and anantenna pattern provided on at least one of the upper surface or thelower surface of the adapter board, and receives power, wherein thehandler comprises an opening including the second surface, wherein themotherboard is disposed in the opening of the handler and occupies aportion of the opening to form a remaining part of the opening as aclosed space, and the adapter board is disposed in the closed space,wherein the second sensor senses an environmental condition of theclosed space.
 2. The test apparatus of claim 1, wherein the secondsensor senses humidity, wherein the wireless transceiver transmits, inreal time, data sensed by the second sensor.
 3. The test apparatus ofclaim 1, further comprising a semiconductor chip mounted on an uppersurface of the adapter board.
 4. The test apparatus of claim 3, whereinthe sensed data is data measured during a test and compared againstpreset data to determine operation condition of the semiconductor chip.5. The test apparatus of claim 1, wherein the first sensor is mounted onat least one of an upper surface of the adapter board or a lower surfaceof the adapter board.
 6. A test apparatus comprising: a motherboardincluding a first surface; a handler including a second surface facingthe first surface of the motherboard; an adapter board unit disposed onthe first surface of the motherboard, wherein the adapter board unitincludes a first adapter board, a second adapter board and a thirdadapter board disposed between the first and second adaptor boards; aplurality of first sensors mounted on the first adapter board and thesecond adapter board, wherein a first sensor of the plurality of firstsensors senses a first operation condition of the adapter board; aplurality of second sensors mounted on a lower surface of the first andsecond adapter boards; a third sensor mounted on the first adapterboard, the second adapter board or the third adapter board, wherein thethird sensor is different from the first sensor, and senses a secondoperation condition of the adapter board different from that of thefirst sensor; and a first semiconductor chip mounted on an upper surfaceof one of the first, second or third adapter board, wherein theplurality of first sensors is mounted on the upper surface of the first,second and third adapter boards, wherein the plurality of first sensorsand the plurality of second sensors each comprise one of a temperaturesensor that measures temperature of the first and second adapter boards,a tilt sensor that measures a tilt of the first and second adapterboards with respect to the motherboard, a vibration sensor that measureswhether the first and second adapter boards vibrate, a bending sensorthat measures a degree of bending of the first and second adapterboards, or a humidity sensor that measures humidity of the first andsecond adapter boards, and the plurality of first sensors comprise asensor different from that of the plurality of second Sensors.
 7. Thetest apparatus of claim 6, wherein the handler comprises an openingincluding the second surface, wherein the motherboard is disposed in theopening of the handler and occupies a portion of the opening to form aremaining part of the opening as a closed space, and the adapter boardwith the plurality of first sensors is disposed in the closed space.